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Abstract:The plastic deformation strain and stress fields around Berkovich indentations on silicon have been studied using X-ray diffraction imaging and Raman spectroscopy. The techniques are complementary; the Raman data come from within a few micrometres of the indentation, whereas the X-ray image probes the strain field at a distance of typically tens of micrometres. For example, Raman data provide an explanation for the central contrast feature in the X-ray images of an indent. Strain relaxation from breakout and high temperature annealing are examined and it is demonstrated that millimetre length cracks, similar to those produced by mechanical damage from misaligned handling tools, can be generated in a controlled fashion by indentation within 75 micrometres of the bevel edge of 200 mm diameter wafers.Keywords: X-ray diffraction imaging; Raman spectroscopy; indentation geometry; plastic deformation; plastic deformation strain imaging
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Next week we'll be revealing a new set of mods for Destiny 2 which are yet to be announced. It's time to cover off the most exciting part of any Destiny 2 update, the Mod World Update.
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